15:00 〜 15:15

[A-1-05] Thickness Scaling on Ferroelectric Al_0.8Sc_0.2N Films

〇Sunglin TSAI¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹, Kuniyuki Kakushima¹ (1. Tokyo Inst.of Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.A-1-05