Thickness Scaling on Ferroelectric Al<sub>0.8</sub>Sc<sub>0.2</sub>N Films

3:00 PM - 3:15 PM

[A-1-05] Thickness Scaling on Ferroelectric Al_0.8Sc_0.2N Films

〇Sunglin TSAI¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹, Kuniyuki Kakushima¹ (1. Tokyo Inst.of Tech.(Japan))