On-Wafer Electron Beam Detectors by Floating-Gate FinFET Technologies

Chih-An Yang

doi:https://doi.org/10.7567/SSDM.2020.A-4-03

11:45 〜 12:00

[A-4-03] On-Wafer Electron Beam Detectors by Floating-Gate FinFET Technologies

Chih-An Yang¹, 〇Jiun Shi Wang¹, Jeng Burn Lin², Jung Chrong Lin¹, Chin Ya King¹ (1. Inst. of Electronics Engineering, National Tsing Hua Univ., Hsinchu(Taiwan), 2. Inst. of Photonics Technologies, National Tsing Hua Univ., Hsinchu(Taiwan))

https://doi.org/10.7567/SSDM.2020.A-4-03

2020 International Conference on Solid State Devices and Materials

[A-4-03] On-Wafer Electron Beam Detectors by Floating-Gate FinFET Technologies