15:00 〜 15:15

[A-5-04] Variability and Corner Effect of GAA p-Type Poly-Si JunctionlessNanowire/Nanosheet Transistors

〇Min-Ju Ahn¹, Takuya Saraya¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1. Inst. of Indus. Sci., Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2020.A-5-04