4:00 PM - 4:30 PM

[A-6-01 (Invited)] Metal-Assisted Solid Phase Crystallization of Vertical Si Channel in 3D Flash Memory

〇Hidenori Miyagawa¹, Haruka Kusai¹, Riichiro Takaishi¹, Tomoya Kawai¹, Yuuichi Kamimuta¹, Toshiya Murakami¹, Keiko Ariyoshi¹, Takanori Asano¹, Masakazu Goto¹, Makoto Fujiwara¹, Yuichiro Mitani¹, Tomoyuki Obu², Hideaki Aochi¹ (1. Kioxia Corp.(Japan), 2. Western Digital Corp.(Japan))

https://doi.org/10.7567/SSDM.2020.A-6-01