10:30 〜 10:45

[A-5-02] A Triple-Deck CFET Structure with an Integrated SRAM Cell for the 2nm Technology Node and Beyond

〇Bingqi Sun¹, Qingpeng Wang², Shaofeng Yu¹ (1. Fudan University(China), 2. Coventor, LamResearch Company(United States of America))

https://doi.org/10.7567/SSDM.2020.A-7-04