16:30 〜 16:45

[B-10-03] 80nm Tall Thermally Stable Cost Effective FinFETs for Advanced DRAM Periphery Devices for AI/ML and Automotive Applications

〇Alessio Spessot¹, Romain Ritzenthaler¹, Eugenio Dentoni Litta¹, Emmanuel Dupuy¹, Barry O’Sullivan¹, Joao Bastos¹, Elena Capogreco¹, Kenichi Miyaguchi¹, Vladimir Machkaoutsan², Younggwang Yoon³, Pierre Fazan², Horiguchi Naoto¹ (1. imec(Belgium), 2. Micron (Belgium), 3. SK Hynix(Belgium))

https://doi.org/10.7567/SSDM.2020.B-10-03