16:30 〜 16:45

[B-2-03] New Material Approach to Enhance Spontaneous Polarization in Ferroelectric HfO₂

〇Kota Takahashi¹, Kazuhiro Matsuo¹, Yuta Kamiya¹, Kunifumi Suzuki¹, Kiwamu Sakuma¹, Masumi Saitoh¹ (1. Kioxia Corp.(Japan))

https://doi.org/10.7567/SSDM.2020.B-2-03