16:45 〜 17:00

[B-2-04] Antiferroelectricity and Cycling Behavior of ALD ZrO₂ Ultra-thin Films

〇Xuan Luo¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1. Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2020.B-2-04