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[C-1-04] Barrier properties of thin TaWN films in Cu(111)/TaWN/Si systems

〇Mayumi B. Takeyama¹, Masaru Sato¹, Mitsunobu Yasuda² (1. Kitami Inst. & Technol.(Japan), 2. Toray Research Center, Inc.(Japan))

https://doi.org/10.7567/SSDM.2020.C-1-04