The Japan Society of Applied Physics

4:15 PM - 4:30 PM

[C-2-02] Analysis and Optimization of Corner Effect of TSV Array in 3D Integrated Circuits

〇Yingwei An1, Xiaoxia Sun3, Yudi Zhao1,2, Min Miao1,2, Kai Zhao1,2 (1. Info. Sci. and Tech. Univ. of Beijing(China), 2. Peking Univ.(China), 3. Labor Relations Univ. of China(China))

https://doi.org/10.7567/SSDM.2020.C-2-02