5:30 PM - 5:45 PM

[C-2-07 (Late News)] Study on relationship between nano particle agglomeration action and polishing characteristics in CMP

〇Mohammed Ahmed Yousof Abdelhakeem Bakier¹, Keisuke Suzuki¹, Panart Khajornrungruang¹ (1. Kyushu Institute of Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.C-2-07