The Japan Society of Applied Physics

14:45 〜 15:00

[C-9-03] An Inverted T-shaped MEMS Capacitive Pressure Sensor
with Multiple-Diaphragm Anchor and On-chip Temperature Sensor

Yoshihiko Kurui1, Fumitaka Ishibashi1, Kei Masunishi1, Tomohiro Saito1, Tomohiko Nagata1, 〇Hiroaki Yamazaki1, Naofumi Nakamura1 (1. Corporate Research & Development Center, Toshiba Corporation(Japan))

https://doi.org/10.7567/SSDM.2020.C-9-03