Air Gap Control Method and Sensitivity Improvement in Capacitive MEMS Hydrogen<br />Sensors

Naoki Hiramatsu

doi:https://doi.org/10.7567/SSDM.2020.C-9-04

3:00 PM - 3:15 PM

[C-9-04] Air Gap Control Method and Sensitivity Improvement in Capacitive MEMS Hydrogen
Sensors

〇Naoki Hiramatsu¹, Yosuke Akimoto¹, Yumi Hayashi¹, Kei Masunishi¹, Tomohiro Saito¹, Naofumi Nakamura¹, Hiroaki Yamazaki¹ (1. Toshiba Corporation.(Japan))

https://doi.org/10.7567/SSDM.2020.C-9-04

2020 International Conference on Solid State Devices and Materials

[C-9-04] Air Gap Control Method and Sensitivity Improvement in Capacitive MEMS HydrogenSensors

[C-9-04] Air Gap Control Method and Sensitivity Improvement in Capacitive MEMS Hydrogen
Sensors