Aperture-Limited Conduction from Acceptor Diffusion in Current Aperture Vertical β-Ga2O3 MOSFETs

Man Hoi Wong

doi:https://doi.org/10.7567/SSDM.2020.D-1-04

14:45 〜 15:00

[D-1-04] Aperture-Limited Conduction from Acceptor Diffusion in Current Aperture Vertical β-Ga₂O₃ MOSFETs

〇Man Hoi Wong^1,2, Hisashi Murakami³, Yoshinao Kumagai³, Masataka Higashiwaki¹ (1. NICT(Japan), 2. Univ. Massachusetts Lowell(United States of America), 3. Tokyo Univ. Agricul. Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.D-1-04

2020 International Conference on Solid State Devices and Materials

[D-1-04] Aperture-Limited Conduction from Acceptor Diffusion in Current Aperture Vertical β-Ga2O3 MOSFETs

[D-1-04] Aperture-Limited Conduction from Acceptor Diffusion in Current Aperture Vertical β-Ga₂O₃ MOSFETs