The Japan Society of Applied Physics

14:45 〜 15:00

[D-1-04] Aperture-Limited Conduction from Acceptor Diffusion in Current Aperture Vertical β-Ga2O3 MOSFETs

〇Man Hoi Wong1,2, Hisashi Murakami3, Yoshinao Kumagai3, Masataka Higashiwaki1 (1. NICT(Japan), 2. Univ. Massachusetts Lowell(United States of America), 3. Tokyo Univ. Agricul. Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.D-1-04