Automatic Detection of Dislocation contrasts in Birefringence Image of SiC Wafers Using Variance Filter Method

Akira Kawata

doi:https://doi.org/10.7567/SSDM.2020.D-4-05

12:00 PM - 12:15 PM

[D-4-05] Automatic Detection of Dislocation contrasts in Birefringence Image of SiC Wafers Using Variance Filter Method

Akira Kawata¹, Kenta Murayama², Shogo Sumitani^1,3, 〇Shunta Harada⁴ (1. Kyoto University(Japan), 2. Mipox Coroporation(Japan), 3. Anamorphosis Networks(Japan), 4. Nagoya University(Japan))

https://doi.org/10.7567/SSDM.2020.D-4-05

2020 International Conference on Solid State Devices and Materials

[D-4-05] Automatic Detection of Dislocation contrasts in Birefringence Image of SiC Wafers Using Variance Filter Method