16:00 〜 16:30 [D-6-01 (Invited)] Recent Progress of Silicon Carbide Super-Junction MOSFETs 〇Ryoji Kosugi1, Shiyang Ji1, Kazuhiro Mochizuki1, Takeharu Kuroiwa1, Hiroshi Yamaguchi1 (1. AIST(Japan)) https://doi.org/10.7567/SSDM.2020.D-6-01