14:00 〜 14:15

[D-9-01] Thermal Stability of alpha-(Al_xGa_1-x)₂O₃ Films Grown on C-Plane Sapphire Substrates

〇Riena Jinno¹, Kentaro Kaneko¹, Shizuo Fujita¹ (1. Kyoto Univ.(Japan))

https://doi.org/10.7567/SSDM.2020.D-9-01