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[D-9-01] Thermal Stability of alpha-(Al_xGa_1-x)₂O₃ Films Grown on C-Plane Sapphire Substrates

〇Riena Jinno¹, Kentaro Kaneko¹, Shizuo Fujita¹ (1. Kyoto Univ.(Japan))

https://doi.org/10.7567/SSDM.2020.D-9-01