Silicon Microdisk Resonators in the Mid-Infrared for On-Chip Gas Sensing

Takuma Miyake

doi:https://doi.org/10.7567/SSDM.2020.E-8-03

11:30 〜 11:45

[E-8-03] Silicon Microdisk Resonators in the Mid-Infrared for On-Chip Gas Sensing

〇Takuma Miyake^1,3, Rikito Osako^1,3, Xuejun Xu¹, Kentarou Sawano³, Takuya Maruizumi³, Takehiko Tawara^1,2, Hideki Gotoh¹ (1. NTT Basic Res. Labs.(Japan), 2. NTT Nanophotonics Center(Japan), 3. Tokyo City Univ.(Japan))

https://doi.org/10.7567/SSDM.2020.E-8-03

2020 International Conference on Solid State Devices and Materials

[E-8-03] Silicon Microdisk Resonators in the Mid-Infrared for On-Chip Gas Sensing