Enlargement of Frequency Bandwidth of Vibrational MEMS Energy Harvester by High Density Electrets

Hiroaki Honma

doi:https://doi.org/10.7567/SSDM.2020.F-1-04

3:00 PM - 3:15 PM

[F-1-04] Enlargement of Frequency Bandwidth of Vibrational MEMS Energy Harvester by High Density Electrets

〇Hiroaki Honma¹, Yukiya Tohyama¹, Hiroyuki Mitsuya², Hisayuki Ashizawa², Hiroshi Toshiyoshi¹ (1. Univ. of Tokyo(Japan), 2. Saginomiya Seisakusho, Inc.(Japan))

https://doi.org/10.7567/SSDM.2020.F-1-04

2020 International Conference on Solid State Devices and Materials

[F-1-04] Enlargement of Frequency Bandwidth of Vibrational MEMS Energy Harvester by High Density Electrets