Size effect of silicon nanocrystals on Seebeck coefficient of phosphorus-doped Si nanocrystals/silicon oxide multilayers

Hisayoshi Kobayashi

doi:https://doi.org/10.7567/SSDM.2020.F-1-05

3:15 PM - 3:30 PM

[F-1-05] Size effect of silicon nanocrystals on Seebeck coefficient of phosphorus-doped Si nanocrystals/silicon oxide multilayers

〇Hisayoshi Kobayashi¹, Shinya Kato², Masashi Kurosawa¹, Kazuhiro Gotoh¹, Noritaka Usami¹, Yasuyoshi Kurokawa¹ (1. Nagoya Univ.(Japan), 2. Nagoya Inst. Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.F-1-05

2020 International Conference on Solid State Devices and Materials

[F-1-05] Size effect of silicon nanocrystals on Seebeck coefficient of phosphorus-doped Si nanocrystals/silicon oxide multilayers