Passivation Mechanism of the High-performance Titanium Oxide Passivating Contacts on Crystalline Silicon Studied by Spectroscopic Ellipsometry

4:15 PM - 4:30 PM

[F-10-02] Passivation Mechanism of the High-performance Titanium Oxide Passivating Contacts on Crystalline Silicon Studied by Spectroscopic Ellipsometry

〇Kazuhiro Gotoh¹, Hiroyuki Miura¹, Ayako Shimizu¹, Yasuyoshi Kurokawa¹, Noritaka Usami¹ (1. Nagoya Univ.(Japan))