16:15 〜 16:30

[F-10-02] Passivation Mechanism of the High-performance Titanium Oxide Passivating Contacts on Crystalline Silicon Studied by Spectroscopic Ellipsometry

〇Kazuhiro Gotoh¹, Hiroyuki Miura¹, Ayako Shimizu¹, Yasuyoshi Kurokawa¹, Noritaka Usami¹ (1. Nagoya Univ.(Japan))

https://doi.org/10.7567/SSDM.2020.F-10-02