16:45 〜 17:00

[F-10-04] Fabrication of TiO_x thin film on Si using solution-based process and its passivation performance

〇Hao Luo¹, Van Hoang Nguyen¹, Kazuhiro Gotoh¹, Yasuyoshi Kurokawa¹, Noritaka Usami¹ (1. Univ. of Nagoya(Japan))

https://doi.org/10.7567/SSDM.2020.F-10-04