Non-Destructive 9.35 GHz Microwave Sensing System for Investigating Electrical Properties of Silicon

17:15 〜 17:30

[F-10-06] Non-Destructive 9.35 GHz Microwave Sensing System for Investigating Electrical Properties of Silicon

〇TOSHIYUKI SAMESHIMA¹, Masahiko Hasumi¹, Tomohisa Mizuno² (1. Tokyo Univ. of Agri. and Tech.(Japan), 2. Kanagawa Univ.(Japan))