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[H-1-04] Micrometer-Scale Monolayer WS₂ Crystal Grown by Alkali Metal Free Gas Source Chemical Vapor Deposition with H₂S and WF₆ Precursors

〇Mitsuhiro Okada¹, Naoya Okada¹, Wen Hsin Chang¹, Tetsuo Shimizu¹, Toshitaka Kubo¹, Masatou Ishihara¹, Toshifumi Irisawa¹ (1. AIST(Japan))

https://doi.org/10.7567/SSDM.2020.H-1-04