Effect of Ion Irradiation on Thermal Conductivity along SiO<sub>2</sub>/Si Interface Evaluated by Molecular Dynamics

Junya Takizawa

doi:https://doi.org/10.7567/SSDM.2020.H-3-05

10:00 〜 10:15

[H-3-05] Effect of Ion Irradiation on Thermal Conductivity along SiO₂/Si Interface Evaluated by Molecular Dynamics

〇Junya Takizawa¹, Sylvia Yuk Yee Chung¹, Motohiro Tomita^1,3, Ryo Yokogawa^2,3, Atsushi Ogura^2,3, Takanobu Watanabe¹ (1. Faculty of Science and Engineering, Waseda Univ.(Japan), 2. School of Sci. and Tech., Meiji Univ.(Japan), 3. MREL(Japan))

https://doi.org/10.7567/SSDM.2020.H-3-05

2020 International Conference on Solid State Devices and Materials

[H-3-05] Effect of Ion Irradiation on Thermal Conductivity along SiO2/Si Interface Evaluated by Molecular Dynamics

[H-3-05] Effect of Ion Irradiation on Thermal Conductivity along SiO₂/Si Interface Evaluated by Molecular Dynamics