Fabrication and Room Temperature Characterization of Trilayer Junctions for the Development of 300 mm Compatible Superconducting Qubits

Danny Wan

doi:https://doi.org/10.7567/SSDM.2020.I-4-03

11:45 〜 12:00

[I-4-03] Fabrication and Room Temperature Characterization of Trilayer Junctions for the Development of 300 mm Compatible Superconducting Qubits

〇Danny Wan¹, Sebastien Couet¹, Xiaoyu Pao¹, Laurent Souriau¹, Diana Tsvetanova¹, Diziana Vangoidsenhoven¹, Arame Thiam¹, Antoine Pacco¹, Anton Potocnik¹, Massimo Mongillo¹, Tsvetan Ivanov¹, Julien Jussot¹, Jeroen Verjauw^1,2, Rohith Acharya^1,2, Jeroen Heijlen¹, Gabriele Luca Donadio¹, Bogdan Govoreanu¹, Frederic Lazzarino¹, Iuliana Radu¹ (1. IMEC vzw(Belgium), 2. KULeuven Univ.(Belgium))

https://doi.org/10.7567/SSDM.2020.I-4-03

2020 International Conference on Solid State Devices and Materials

[I-4-03] Fabrication and Room Temperature Characterization of Trilayer Junctions for the Development of 300 mm Compatible Superconducting Qubits