Superconducting Poly-SOI Layers by Boron Ion Implantation and UV Nanosecond Laser Annealing

Richard Daubriac

doi:https://doi.org/10.7567/SSDM.2020.I-4-04

12:00 〜 12:15

[I-4-04] Superconducting Poly-SOI Layers by Boron Ion Implantation and UV Nanosecond Laser Annealing

〇Richard Daubriac¹, Pablo Acosta Alba¹, Stéphane Lequien², Christophe Marcenat², Tom Doekle Vethaak², Fabrice Nemouchi¹, François Lefloch², Sébastien Kerdilès¹ (1. Univ. Grenoble Alpes, CEA LETI(France), 2. Univ. Grenoble Alpes, CEA IRIG(France))

https://doi.org/10.7567/SSDM.2020.I-4-04

2020 International Conference on Solid State Devices and Materials

[I-4-04] Superconducting Poly-SOI Layers by Boron Ion Implantation and UV Nanosecond Laser Annealing