Effects of water and hydrogen introduction during In–Ga–Zn–O sputtering on the performance of low-temperature processed thin-film transistors

Yusaku Magari

doi:https://doi.org/10.7567/SSDM.2020.J-2-01

16:00 〜 16:15

[J-2-01] Effects of water and hydrogen introduction during In–Ga–Zn–O sputtering on the performance of low-temperature processed thin-film transistors

〇Yusaku Magari^1,2, Mamoru Furuta^1,2 (1. School of Environmental Sci. and Eng., Kochi Univ. of Tech.(Japan), 2. Center for Nanotech., Kochi Univ. of Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.J-2-01

2020 International Conference on Solid State Devices and Materials

[J-2-01] Effects of water and hydrogen introduction during In–Ga–Zn–O sputtering on the performance of low-temperature processed thin-film transistors