The Japan Society of Applied Physics

14:15 〜 14:30

[J-5-02] Characteristics of Rapidly Solid Phase Crystallized Amorphous Silicon Films Formed by Micro-Thermal-Plasma Jet Irradiation

〇Hoa ThiKhanh Nguyen1, Hiroaki Hanafusa1, Yuri Mizukawa1, Shohei Hayashi2, Seiichiro Higashi1 (1. Hiroshima Univ.(Japan), 2. Toray Res. Center(Japan))

https://doi.org/10.7567/SSDM.2020.J-5-02