14:45 〜 15:00

[J-5-04] Direct Writing of Si Nanostructures at Room Temperature by Electron Beam

〇Masahiro Mori¹, Masashi Akabori¹, Takashi Masuda¹ (1. JAIST(Japan))

https://doi.org/10.7567/SSDM.2020.J-5-04