300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility

Luka Kljucar

doi:https://doi.org/10.7567/SSDM.2020.J-6-03

4:45 PM - 5:00 PM

[J-6-03] 300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility

〇Luka Kljucar¹, Quentin Smets¹, Michiel Setten¹, Jerome Mitard¹, Atillio Belmonte¹, Harold Dekkers¹, Lieve Teugels¹, Ming Mao¹, Harinarayanan Puliyalil¹, Jose Ignacio del Agua Borniquel², Romain Delhougne¹, Gouri Sankar Kar¹, Zsolt Tokei¹ (1. IMEC(Belgium), 2. AMAT(Belgium))

https://doi.org/10.7567/SSDM.2020.J-6-03

2020 International Conference on Solid State Devices and Materials

[J-6-03] 300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility