High-performance IGZO TFTs with Cu-based Multilayer Electrodes using MoAl Alloy as Buffer Layers

Chuan Liu

doi:https://doi.org/10.7567/SSDM.2020.J-6-04

17:00 〜 17:15

[J-6-04] High-performance IGZO TFTs with Cu-based Multilayer Electrodes using MoAl Alloy as Buffer Layers

〇Chuan Liu¹, Zhaogui Wang¹, Yafang Wang¹, Gongtan Li², Shan Li² (1. Sun Yat-Sen University(China), 2. Shenzhen China Star Optoelectronics Technology Co., Ltd(China))

https://doi.org/10.7567/SSDM.2020.J-6-04

2020 International Conference on Solid State Devices and Materials

[J-6-04] High-performance IGZO TFTs with Cu-based Multilayer Electrodes using MoAl Alloy as Buffer Layers