Rapid annealing of metal thin films by micron chevron-shaped laser beam scanning

Anh Hoang Pham

doi:https://doi.org/10.7567/SSDM.2020.K-10-05

5:00 PM - 5:15 PM

[K-10-05] Rapid annealing of metal thin films by micron chevron-shaped laser beam scanning

〇Anh Hoang Pham^1,3, Naruki Fukunaga², Wenchang Yeh^1,3, Shigekazu Morito^1,3, Takuya Ohba³ (1. Department of Physics and Materials Science, Shimane University(Japan), 2. Graduate School of Science and Technology, Shimane University(Japan), 3. Next Generation TATARA Co-creation Centre, Shimane University(Japan))

https://doi.org/10.7567/SSDM.2020.K-10-05

2020 International Conference on Solid State Devices and Materials

[K-10-05] Rapid annealing of metal thin films by micron chevron-shaped laser beam scanning