11:15 〜 11:30

[K-8-02] Elimination of Threading Dislocations in Corundum Ga₂O₃ Grown by Double-layered Epitaxial Lateral Overgrowth

〇Katsuaki Kawara¹, Yuichi Oshima², Mitsuru Okigawa¹, Takashi Shinohe¹ (1. FLOSFIA Inc.(Japan), 2. NIMS(Japan))

https://doi.org/10.7567/SSDM.2020.K-8-02