Elimination of Threading Dislocations in Corundum Ga<sub>2</sub>O<sub>3</sub> Grown by Double-layered Epitaxial Lateral Overgrowth

11:15 AM - 11:30 AM

[K-8-02] Elimination of Threading Dislocations in Corundum Ga₂O₃ Grown by Double-layered Epitaxial Lateral Overgrowth

〇Katsuaki Kawara¹, Yuichi Oshima², Mitsuru Okigawa¹, Takashi Shinohe¹ (1. FLOSFIA Inc.(Japan), 2. NIMS(Japan))