Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs

TOMOKO MIZUTANI, KIYOSHI TAKEUCHI, TAKUYA SARAYA, HIROSHI OKA, TAKAHIRO MORI, MASAHARU KOBAYASHI, TOSHIRO HIRAMOTO

doi:https://doi.org/10.7567/SSDM.2021.A-1-06

2:58 PM - 3:05 PM

[A-1-06] Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs

〇TOMOKO MIZUTANI¹, KIYOSHI TAKEUCHI¹, TAKUYA SARAYA¹, HIROSHI OKA², TAKAHIRO MORI², MASAHARU KOBAYASHI^1,3, TOSHIRO HIRAMOTO¹ (1.IIS, Univ. of Tokyo, 2.AIST, 3.d.lab, Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.A-1-06

2021 International Conference on Solid State Devices and Materials

[A-1-06] Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs