Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs

TOMOKO MIZUTANI

doi:https://doi.org/10.7567/SSDM.2021.A-1-06

14:58 〜 15:05

[A-1-06] Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs

〇TOMOKO MIZUTANI¹、KIYOSHI TAKEUCHI¹、TAKUYA SARAYA¹、HIROSHI OKA²、TAKAHIRO MORI²、MASAHARU KOBAYASHI^1,3、TOSHIRO HIRAMOTO¹ (1.IIS, Univ. of Tokyo、2.AIST、3.d.lab, Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.A-1-06

2021 International Conference on Solid State Devices and Materials

[A-1-06] Effect of Percolation Path on Temperature Dependence of Threshold Voltage Variability in Bulk MOSFETs