Low Thermal Budget Epitaxial Lift Off for Ge (111)-on-Insulator Structure

Wen-Hsin Chang

doi:https://doi.org/10.7567/SSDM.2021.A-4-04

11:29 〜 11:36

[A-4-04] Low Thermal Budget Epitaxial Lift Off for Ge (111)-on-Insulator Structure

〇Wen-Hsin Chang¹、Hsien-Wen Wan²、Yi-Ting Cheng²、Yen-Hsun G. Lin²、Toshifumi Irisawa¹、Hiroyuki Ishii¹、 Jueinai Kwo³、Minghwei Hong²、Tatsuro Maeda¹ (1.Natl. Inst. of Adv. Indus. Sci. Tech.、2.Grad. Inst. of Appl. Phys. and Dept. of Phys., Natl. Taiwan Univ.、3.Dept. of Phys., Natl. Tsing Hua Univ.)

https://doi.org/10.7567/SSDM.2021.A-4-04

2021 International Conference on Solid State Devices and Materials

[A-4-04] Low Thermal Budget Epitaxial Lift Off for Ge (111)-on-Insulator Structure