Low Thermal Budget Epitaxial Lift Off for Ge (111)-on-Insulator Structure

Wen-Hsin Chang, Hsien-Wen Wan, Yi-Ting Cheng, Yen-Hsun G. Lin, Toshifumi Irisawa, Hiroyuki Ishii,  Jueinai Kwo, Minghwei Hong, Tatsuro Maeda

doi:https://doi.org/10.7567/SSDM.2021.A-4-04

11:29 AM - 11:36 AM

[A-4-04] Low Thermal Budget Epitaxial Lift Off for Ge (111)-on-Insulator Structure

〇Wen-Hsin Chang¹, Hsien-Wen Wan², Yi-Ting Cheng², Yen-Hsun G. Lin², Toshifumi Irisawa¹, Hiroyuki Ishii¹, Jueinai Kwo³, Minghwei Hong², Tatsuro Maeda¹ (1.Natl. Inst. of Adv. Indus. Sci. Tech., 2.Grad. Inst. of Appl. Phys. and Dept. of Phys., Natl. Taiwan Univ., 3.Dept. of Phys., Natl. Tsing Hua Univ.)

https://doi.org/10.7567/SSDM.2021.A-4-04

2021 International Conference on Solid State Devices and Materials

[A-4-04] Low Thermal Budget Epitaxial Lift Off for Ge (111)-on-Insulator Structure