Control of HfO<sub>2</sub> Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing

Toshiyuki Tabata

doi:https://doi.org/10.7567/SSDM.2021.A-5-02

14:07 〜 14:14

[A-5-02] Control of HfO₂ Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing

〇Toshiyuki Tabata¹、Pablo Acosta Alba²、Jérôme Richy²、Marianne Coig²、Pierre-Edouard Raynal¹、Fabien Rozé¹、Sebastien Kerdilès² (1.Laser Systems & Solutions of Europe (LASSE)、2.Univ. Grenoble Alpes, CEA-LETI)

https://doi.org/10.7567/SSDM.2021.A-5-02

2021 International Conference on Solid State Devices and Materials

[A-5-02] Control of HfO2 Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing

[A-5-02] Control of HfO₂ Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing