2:07 PM - 2:14 PM

[A-5-02] Control of HfO₂ Crystallizing Phase in UV Nanosecond Pulsed Laser Annealing

〇Toshiyuki Tabata¹, Pablo Acosta Alba², Jérôme Richy², Marianne Coig², Pierre-Edouard Raynal¹, Fabien Rozé¹, Sebastien Kerdilès² (1.Laser Systems & Solutions of Europe (LASSE), 2.Univ. Grenoble Alpes, CEA-LETI)

https://doi.org/10.7567/SSDM.2021.A-5-02