Antiferroelectric properties of ALD ZrO<sub>2</sub> ultra-thin films: correlation with the crystalline structure

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[A-5-03] Antiferroelectric properties of ALD ZrO₂ ultra-thin films: correlation with the crystalline structure

〇Xuan Luo¹、Kasidit Toprasertpong¹、Mitsuru Takenaka¹、Shinichi Takagi¹ (1.Univ. of Tokyo)