2:14 PM - 2:21 PM

[A-5-03] Antiferroelectric properties of ALD ZrO₂ ultra-thin films: correlation with the crystalline structure

〇Xuan Luo¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.A-5-03