4:15 PM - 4:22 PM

[A-6-02] Potential benefits of S/D HDD activation by melt laser annealing in 3D-integrated top-tier FDSOI FETs

Anne Vandooren¹, 〇Toshiyuki Tabata², Pierre Eyben¹, Erik Roseel¹, Andriy Hikavyy¹, Karim Huet², Fulvio Mazzamuto², Eugenio Dentoni Litta¹, Naoto Horiguchi¹ (1.imec, 2.Laser Systems & Solutions of Europe (LASSE))

https://doi.org/10.7567/SSDM.2021.A-6-02