16:15 〜 16:22

[A-6-02] Potential benefits of S/D HDD activation by melt laser annealing in 3D-integrated top-tier FDSOI FETs

Anne Vandooren¹、〇Toshiyuki Tabata²、Pierre Eyben¹、Erik Roseel¹、Andriy Hikavyy¹、Karim Huet²、Fulvio Mazzamuto²、Eugenio Dentoni Litta¹、Naoto Horiguchi¹ (1.imec、2.Laser Systems & Solutions of Europe (LASSE))

https://doi.org/10.7567/SSDM.2021.A-6-02