Impact of the buried oxide thickness in UV laser heated 3D stacks

Pierre Morin, Toshiyuki Tabata, Fabien Rozé , Mohamed Saib , Hilde Thielens , Louis Thuries , Karim Huet, Fulvio Mazzamuto

doi:https://doi.org/10.7567/SSDM.2021.A-6-03

4:22 PM - 4:29 PM

[A-6-03] Impact of the buried oxide thickness in UV laser heated 3D stacks

Pierre Morin¹, 〇Toshiyuki Tabata², Fabien Rozé ², Mohamed Saib ¹, Hilde Thielens ¹, Louis Thuries ², Karim Huet², Fulvio Mazzamuto ² (1.imec, 2.Laser Systems & Solutions of Europe (LASSE))

https://doi.org/10.7567/SSDM.2021.A-6-03

2021 International Conference on Solid State Devices and Materials

[A-6-03] Impact of the buried oxide thickness in UV laser heated 3D stacks